| Operation modes | Contact mode, friction mode, extended modes of tapping phase, MFM, EFM, scans at random angle |
| Scan angle | Random angle |
| Maximum scan range | X/Y axis: 20 µm, Z axis: 2 µm |
| Operation modes | Contact mode, friction mode, extended modes of tapping phase, MFM, EFM, scan angle 0 to 360° |
| Scan angle | 0 to 360° |
| Maximum scan range | X/Y axis: 50 µm, Z axis: 5 µm |
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